Domestic substitution accelerates! Another mainland operator purchased ASML lithography machine

Ltd. was commissioned by Shanghai Xingyang to bid for an ASML photolithography machine, which can be used to develop high-end photoresists with a resolution of 28 nanometers.

Shanghai Xinyang, a mainland supplier of key process materials for the manufacturing of integrated circuits, has successfully acquired a photolithography machine, according to its latest announcement.

The announcement points out that Core Micro made the first 10% payment to Sheng Jisheng on the 11th to purchase the lithography machine, and the remaining 90% will be paid off within six months. The company will start the transportation of the equipment and related installation and commissioning work.

The company said that the technology requirement of ArF wet photoresist for IC manufacturing is high and the investment demand is large, so in order to accelerate the localization process of the whole category of high-end photoresist for IC manufacturing and reduce the pressure on the performance of the listed company, the company conducts the research and development of Ar wet photoresist through its subsidiary Core Micro, and undertakes with the parties to the agreement to avoid possible competition in the same industry by transferring equity or technology to the listed company in the future. Possible competition in the same industry.

Shanghai Xinyang stressed that photoresist products are technically difficult among IC materials, with the highest quality requirements and long development cycles, and the core technology and raw materials are almost monopolized by foreign manufacturers.

The announcement said that the purchased model is a used ASML XT1900 Gi type lithography machine, but did not disclose the price.

First Financial reports that it is worth noting that this is not the first Time that Shanghai Xinyang has purchased photoresist products. The company announced on March 8 that the ASML-1400 photolithography equipment had entered the site of the partner Northern Integrated Circuit Technology Innovation Center (Beijing) on the same day, and the subsequent installation and debugging and other related work will be carried out, which will have a positive impact on accelerating the progress of 193nm photoresist product development.

Recently many mainland listed companies are buying photolithography machines. Jingrui announced on January 19 that it has successfully purchased an ASML XT1900 Gi type lithography machine. SMIC announced on March 3 that it had signed an equipment purchase agreement with ASML on February 1. In addition, Innosys also announced its intention to purchase photolithography equipment this year.

Since the second half of last year, chip shortages and price increases have become the main theme of the semiconductor industry. And photoresist as the core material of the semiconductor lithography process, determine the precision and yield of the semiconductor graphics process, become one of the most attention link.

CICC has pointed out that semiconductor equipment and materials are the basis for the development of high-end manufacturing, combined with SMIC’s potential mature process to obtain U.S. equipment licenses, it is recommended to pay attention to the opportunities of upstream equipment and raw materials.

Recently many mainland listed companies are buying lithography machines.